مؤتمر
Spring-constant measurement methods for RF-MEMS capacitive switches
| العنوان: | Spring-constant measurement methods for RF-MEMS capacitive switches |
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| المؤلفون: | Wang, Jiahui, Bielen, Jeroen, Salm, Cora, Schmitz, Jurriaan |
| المصدر: | 2016 International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2016 International Conference on. :10-14 Mar, 2016 |
| Relation: | 2016 International Conference on Microelectronic Test Structures (ICMTS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467387910 9781467387934 9781467387927 |
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| تدمد: | 10719032 21581029 |
| DOI: | 10.1109/ICMTS.2016.7476164 |