مؤتمر
Novel test structure for evaluating dynamic dopant activation after ion implantation
| العنوان: | Novel test structure for evaluating dynamic dopant activation after ion implantation |
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| المؤلفون: | Tsai, Jung-Ruey, Chang, Ruey-Dar, Chou, Cheng-Hui, Liao, Hsueh-Chun, Huang, Sz-Kai, Lin, Sung-Hung, Lin, Jui-Chang |
| المصدر: | 2016 International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2016 International Conference on. :168-171 Mar, 2016 |
| Relation: | 2016 International Conference on Microelectronic Test Structures (ICMTS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467387910 9781467387934 9781467387927 |
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| تدمد: | 10719032 21581029 |
| DOI: | 10.1109/ICMTS.2016.7476200 |