دورية أكاديمية
Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units
| العنوان: | Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units |
|---|---|
| المؤلفون: | Haddad, B.M., Yang, S., Karam, L.J., Ye, J., Patel, N.S., Braun, M.W. |
| المصدر: | IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 15(1):145-159 Jan, 2018 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 15455955 15583783 |
|---|---|
| DOI: | 10.1109/TASE.2016.2594288 |