Optimization of MEMS intraocular capacitive pressure sensor

التفاصيل البيبلوغرافية
العنوان: Optimization of MEMS intraocular capacitive pressure sensor
المؤلفون: Ali, Muslihah, Noorakma, Abdullah C. W., Yusof, Norliana, Mohamad, W. N. F., Soin, N., Hatta, S. F. Wan Muhamad
المصدر: 2016 IEEE International Conference on Semiconductor Electronics (ICSE) Semiconductor Electronics (ICSE), 2016 IEEE International Conference on. :173-176 Aug, 2016
Relation: 2016 IEEE International Conference on Semiconductor Electronics (ICSE)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509023837
9781509023820
DOI:10.1109/SMELEC.2016.7573619