دورية أكاديمية
Identification of Statistical Distributions for Cycle Time in Wafer Fabrication
| العنوان: | Identification of Statistical Distributions for Cycle Time in Wafer Fabrication |
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| المؤلفون: | Tirkel, I., Parmet, Y. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 30(1):90-97 Feb, 2017 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2016.2616198 |