مؤتمر
Effects of energetic negative ions generated from sputtering targets on ScAlN film growth
| العنوان: | Effects of energetic negative ions generated from sputtering targets on ScAlN film growth |
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| المؤلفون: | Takayanagi, Shinji, Matsukawa, Mami, Yanagitani, Takahiko |
| المصدر: | 2016 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2016 IEEE International. :1-4 Sep, 2016 |
| Relation: | 2016 IEEE International Ultrasonics Symposium (IUS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467398978 |
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| تدمد: | 19485727 |
| DOI: | 10.1109/ULTSYM.2016.7728836 |