مؤتمر
Effects of energetic negative ions generated from sputtering targets on ScAlN film growth
العنوان: | Effects of energetic negative ions generated from sputtering targets on ScAlN film growth |
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المؤلفون: | Takayanagi, Shinji, Matsukawa, Mami, Yanagitani, Takahiko |
المصدر: | 2016 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2016 IEEE International. :1-4 Sep, 2016 |
Relation: | 2016 IEEE International Ultrasonics Symposium (IUS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781467398978 |
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تدمد: | 19485727 |
DOI: | 10.1109/ULTSYM.2016.7728836 |