Fabrication of 200 mm Germanium-On-Insulator (GeOI): A step toward a Germanium photonic platform

التفاصيل البيبلوغرافية
العنوان: Fabrication of 200 mm Germanium-On-Insulator (GeOI): A step toward a Germanium photonic platform
المؤلفون: Reboud, V., Widiez, J., Hartmann, J. M., Gomez, E., Gassenq, A., Guilloy, K., Bertrand, M., Tardif, S., Escalante, J. M., Pauc, N., Fowler, D., Bellet Amalric, E., Rouchon, D., Duchemin, I., Niquet, Y. M., Rieutord, F., Geiger, R., Zabel, T., Marin, E., Sigg, H., Faist, J., Chelnokov, A., Calvo, V.
المصدر: 2016 IEEE 13th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2016 IEEE 13th International Conference on. :140-142 Aug, 2016
Relation: 2016 IEEE 13th International Conference on Group IV Photonics (GFP)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509019038
9781509015894
DOI:10.1109/GROUP4.2016.7739074