دورية أكاديمية
Thickness Measurement of Oxide and Carbonaceous Layers on a 28Si Sphere by XPS
العنوان: | Thickness Measurement of Oxide and Carbonaceous Layers on a 28Si Sphere by XPS |
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المؤلفون: | Zhang, L., Kuramoto, N., Azuma, Y., Kurokawa, A., Fujii, K. |
المصدر: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 66(6):1297-1303 Jun, 2017 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189456 15579662 |
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DOI: | 10.1109/TIM.2016.2634678 |