مؤتمر
Simulation study of SU-8 structures realized by single-step projection photolithography
| العنوان: | Simulation study of SU-8 structures realized by single-step projection photolithography |
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| المؤلفون: | Nakamura, K., Hirai, Y., Tsuchiya, T., Tabata, O., Larramendy, F., Paul, O. |
| المصدر: | 2016 IEEE SENSORS SENSORS, 2016 IEEE. :1-3 Oct, 2016 |
| Relation: | 2016 IEEE SENSORS |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479982875 |
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| DOI: | 10.1109/ICSENS.2016.7808444 |