مؤتمر
A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope
| العنوان: | A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope |
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| المؤلفون: | Giner, J., Zhang, Y., Shiota, T., Maeda, D., Ono, K., Kajiyama, S., Oshima, T., Yamawaki, T., Sekiguchi, T. |
| المصدر: | 2016 IEEE SENSORS SENSORS, 2016 IEEE. :1-3 Oct, 2016 |
| Relation: | 2016 IEEE SENSORS |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479982875 |
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| DOI: | 10.1109/ICSENS.2016.7808706 |