دورية أكاديمية
Influence of sample placement on the dose uniformity in plasma immersion ion implantation of industrial ball bearings
العنوان: | Influence of sample placement on the dose uniformity in plasma immersion ion implantation of industrial ball bearings |
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المؤلفون: | Zhaoming Zeng, Xiubo Tian, Dixon Tat-Kun Kwok, Baoyin Tang, Chu, P.K. |
المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 27(4):1203-1209 Aug, 1999 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00933813 19399375 |
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DOI: | 10.1109/27.782301 |