مؤتمر
The investigation of d.c. magnetron reactively sputtered AlN films applied to GaAs devices passivation
| العنوان: | The investigation of d.c. magnetron reactively sputtered AlN films applied to GaAs devices passivation |
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| المؤلفون: | Xin Cao, Jinsheng Luo, Tangsheng Chen, Kejin Chen |
| المصدر: | 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) Solid-state and integrated circuit technology Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on. :696-700 1998 |
| Relation: | Proceedings of Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780343069 9780780343061 |
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| DOI: | 10.1109/ICSICT.1998.786064 |