Shock-protection of nano-gap capacitive MEMS accelerometers using sloped electrode design

التفاصيل البيبلوغرافية
العنوان:	Shock-protection of nano-gap capacitive MEMS accelerometers using sloped electrode design
المؤلفون:	Jeong, Yaesuk, Foster, Michael, Chae, Junghun, Serrano, Diego E., Ayazi, Farrokh
المصدر:	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on. :1150-1153 Jan, 2017
Relation:	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
ردمك:	9781509050789
DOI:	10.1109/MEMSYS.2017.7863618