دورية أكاديمية
Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators
| العنوان: | Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators |
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| المؤلفون: | Segovia-Fernandez, J., Piazza, G. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 26(3):550-558 Jun, 2017 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2017.2672962 |