التفاصيل البيبلوغرافية
العنوان: |
Sheet Resistance Dependence on Ion Angle Deviation |
المؤلفون: |
Kawasaki, Yoji, Tsukahara, Kazutaka, Sano, Makoto, Kawatsu, Sho, Koike, Masazumi, Kariya, Hiroyuki, Kabasawa, Mitsuaki |
المصدر: |
2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016 |
Relation: |
2016 21st International Conference on Ion Implantation Technology (IIT) |
قاعدة البيانات: |
IEEE Xplore Digital Library |