التفاصيل البيبلوغرافية
| العنوان: |
Sheet Resistance Dependence on Ion Angle Deviation |
| المؤلفون: |
Kawasaki, Yoji, Tsukahara, Kazutaka, Sano, Makoto, Kawatsu, Sho, Koike, Masazumi, Kariya, Hiroyuki, Kabasawa, Mitsuaki |
| المصدر: |
2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016 |
| Relation: |
2016 21st International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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