Surface Strained Ge-Cz Wafers by Sn-Implantation for High Electron and Hole Mobility

التفاصيل البيبلوغرافية
العنوان: Surface Strained Ge-Cz Wafers by Sn-Implantation for High Electron and Hole Mobility
المؤلفون: Borland, John, Sugitani, Michiro, Chaung, S. S., Lee, Y. J., Huet, Karim, Joshi, Abhijeet, Wan, Alan, Wong, Larry, Horvath, Peter, Finley, Andrew
المصدر: 2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016
Relation: 2016 21st International Conference on Ion Implantation Technology (IIT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509020249
DOI:10.1109/IIT.2016.7882912