Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process

التفاصيل البيبلوغرافية
العنوان:	Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process
المؤلفون:	Efimovskaya, Alexandra, Yushi Yang, Ng, Eldwin, Yunhan Chen, Flader, Ian, Kenny, Thomas W., Shkel, Andrei M.
المصدر:	2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2017 IEEE International Symposium on. :1-2 Mar, 2017
Relation:	2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
ردمك:	9781509032341
DOI:	10.1109/ISISS.2017.7935698