Al-Al wafer-level thermocompression bonding applied for MEMS

التفاصيل البيبلوغرافية
العنوان: Al-Al wafer-level thermocompression bonding applied for MEMS
المؤلفون: Taklo, M.M. Visser, Schjolberg-Henriksen, K., Malik, N., Poppe, E., Moe, S.T., Finstad, T.G.
المصدر: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2017 5th International Workshop on. :11-11 May, 2017
Relation: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784904743034
9784904743058
DOI:10.23919/LTB-3D.2017.7947407