Bond strength of 3D-stacked monocrystalline silicon X-ray mirrors

التفاصيل البيبلوغرافية
العنوان: Bond strength of 3D-stacked monocrystalline silicon X-ray mirrors
المؤلفون: Girou, D. A., Landgraf, B., Guenther, R., Collon, M. J., Beijersbergen, M. W.
المصدر: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2017 5th International Workshop on. :14-14 May, 2017
Relation: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784904743034
9784904743058
DOI:10.23919/LTB-3D.2017.7947410