مؤتمر
Time and temperature dependent mechanical behavior of Al/Ti thin films application for MEMS
| العنوان: | Time and temperature dependent mechanical behavior of Al/Ti thin films application for MEMS |
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| المؤلفون: | Lin, Tai-Ting, Tsai, Ang-Ting, Lin, Ming-Tzer |
| المصدر: | 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2017 Symposium on. :1-6 May, 2017 |
| Relation: | 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781538629529 |
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| DOI: | 10.1109/DTIP.2017.7984495 |