High-damped accelerometer based on squeeze-film damping and piezoresistive nanogauge detection for vibrating environments

التفاصيل البيبلوغرافية
العنوان: High-damped accelerometer based on squeeze-film damping and piezoresistive nanogauge detection for vibrating environments
المؤلفون: Fain, B., Chaehoi, A., Berthelot, A., Verdot, T., Souchon, F., Delachanal, S., Koumela, A., Nowodzinski, A., Lhermet, H., Jourdan, G., Rey, P., Robert, P.
المصدر: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :603-606 Jun, 2017
Relation: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538627327
تدمد:21670021
DOI:10.1109/TRANSDUCERS.2017.7994121