First demonstration of vertically stacked ferroelectric Al doped HfO2 devices for NAND applications

التفاصيل البيبلوغرافية
العنوان: First demonstration of vertically stacked ferroelectric Al doped HfO2 devices for NAND applications
المؤلفون: Florent, K., Lavizzari, S., Di Piazza, L., Popovici, M., Vecchio, E., Potoms, G., Groeseneken, G., Van IHoudt, J.
المصدر: 2017 Symposium on VLSI Technology VLSI Technology, 2017 Symposium on. :T158-T159 Jun, 2017
Relation: 2017 Symposium on VLSI Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784863486058
تدمد:21589682
DOI:10.23919/VLSIT.2017.7998162