دورية أكاديمية
Effects of Plasma Parameter on Morphological and Electrical Properties of Superconducting Nb-N Deposited by MO-PEALD
| العنوان: | Effects of Plasma Parameter on Morphological and Electrical Properties of Superconducting Nb-N Deposited by MO-PEALD |
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| المؤلفون: | Ziegler, M., Linzen, S., Goerke, S., Bruckner, U., Plentz, J., Dellith, J., Himmerlich, A., Himmerlich, M., Hubner, U., Krischok, S., Meyer, H. |
| المصدر: | IEEE Transactions on Applied Superconductivity IEEE Trans. Appl. Supercond. Applied Superconductivity, IEEE Transactions on. 27(7):1-7 Oct, 2017 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10518223 15582515 23787074 |
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| DOI: | 10.1109/TASC.2017.2744326 |