The performance of two purification media in their removal of impurities from inert gases

التفاصيل البيبلوغرافية
العنوان: The performance of two purification media in their removal of impurities from inert gases
المؤلفون: Jian Wei, Kondrashov, D., Vakhshoori, K., Colorado, A.
المصدر: Twenty Fourth IEEE/CPMT International Electronics Manufacturing Technology Symposium (Cat. No.99CH36330) Electronics manufacturing technology Electronics Manufacturing Technology Symposium, 1999. Twenty-Fourth IEEE/CPMT. :370-377 1999
Relation: Twenty Fourth IEEE/CPMT International Electronics Manufacturing Technology Symposium
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780355024
9780780355026
تدمد:10898190
DOI:10.1109/IEMT.1999.804848