دورية أكاديمية
MOCVD Growth of High Quality InGaAs HEMT Layers on Large Scale Si Wafers for Heterogeneous Integration With Si CMOS
| العنوان: | MOCVD Growth of High Quality InGaAs HEMT Layers on Large Scale Si Wafers for Heterogeneous Integration With Si CMOS |
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| المؤلفون: | Nguyen, X.S., Yadav, S., Lee, K.H., Kohen, D., Kumar, A., Made, R.I., Lee, K.E.K., Chua, S.J., Gong, X., Fitzgerald, E.A. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 30(4):456-461 Nov, 2017 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2017.2756684 |