مؤتمر
WS2 transistors on 300 mm wafers with BEOL compatibility
العنوان: | WS2 transistors on 300 mm wafers with BEOL compatibility |
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المؤلفون: | Schram, T., Smets, Q., Groven, B., Heyne, M. H., Kunnen, E., Thiam, A., Devriendt, K., Delabie, A., Lin, D., Lux, M., Chiappe, D., Asselberghs, I., Brus, S., Huyghebaert, C., Sayan, S., Juncker, A., Caymax, M., Radu, I. P. |
المصدر: | 2017 47th European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), 2017 47th European. :212-215 Sep, 2017 |
Relation: | ESSDERC 2017 - 47th IEEE European Solid-State Device Research Conference (ESSDERC) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781509059782 9781509059775 |
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تدمد: | 23786558 |
DOI: | 10.1109/ESSDERC.2017.8066629 |