WS2 transistors on 300 mm wafers with BEOL compatibility

التفاصيل البيبلوغرافية
العنوان: WS2 transistors on 300 mm wafers with BEOL compatibility
المؤلفون: Schram, T., Smets, Q., Groven, B., Heyne, M. H., Kunnen, E., Thiam, A., Devriendt, K., Delabie, A., Lin, D., Lux, M., Chiappe, D., Asselberghs, I., Brus, S., Huyghebaert, C., Sayan, S., Juncker, A., Caymax, M., Radu, I. P.
المصدر: 2017 47th European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), 2017 47th European. :212-215 Sep, 2017
Relation: ESSDERC 2017 - 47th IEEE European Solid-State Device Research Conference (ESSDERC)
قاعدة البيانات: IEEE Xplore Digital Library