Nanolithography toolbox: Device design at the nanoscale

التفاصيل البيبلوغرافية
العنوان: Nanolithography toolbox: Device design at the nanoscale
المؤلفون: Balram, K. C., Westly, D. A., Davanco, M., Grutter, K. E., Li, Q., Michels, T., Ray, C. H., Yu, L., Kasica, R. J., Wallin, C. B., Gilbert, I. J., Bryce, Brian A., Simelgor, G., Topolancik, J., Lobontiu, N., Liu, Y., Neuzil, P., Svatos, V., Dill, K. A., Bertrand, N. A., Metzler, M., Lopez, G., Czaplewski, D. A., Ocola, L., Srinivasan, K. A., Stavis, S. M., Aksyuk, V. A., Liddle, J. A., Krylov, S., Ilic, B. R.
المصدر: 2017 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2017 Conference on. :1-2 May, 2017
Relation: 2017 Conference on Lasers and Electro-Optics (CLEO)
قاعدة البيانات: IEEE Xplore Digital Library