مؤتمر
Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS)
العنوان: | Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS) |
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المؤلفون: | Sunnys Hsieh, Sheng-Che Lin, Ming-Huei Lee, Jian-Rong Wang, Chingfu Lin, Chia-Wen Huang, Jye-Yen Cheng, Yu-Hao Yang, Doong, K.Y.-Y., Miyamoto, K., Hsu, C.C.-H. |
المصدر: | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) Semiconductor manufacturing Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on. :241-244 1999 |
Relation: | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780354036 9780780354036 |
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تدمد: | 1523553X |
DOI: | 10.1109/ISSM.1999.808781 |