Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS)

التفاصيل البيبلوغرافية
العنوان:	Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS)
المؤلفون:	Sunnys Hsieh, Sheng-Che Lin, Ming-Huei Lee, Jian-Rong Wang, Chingfu Lin, Chia-Wen Huang, Jye-Yen Cheng, Yu-Hao Yang, Doong, K.Y.-Y., Miyamoto, K., Hsu, C.C.-H.
المصدر:	1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) Semiconductor manufacturing Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on. :241-244 1999
Relation:	1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
قاعدة البيانات:	IEEE Xplore Digital Library

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