مؤتمر
Processing and mechanical characterization of ultrananocrisytalline diamond films for MEMS applications
| العنوان: | Processing and mechanical characterization of ultrananocrisytalline diamond films for MEMS applications |
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| المؤلفون: | Pachiu, C., Tibeica, C., Avram, A., Veca, M., Sandu, T., Popescu, M., Popa, R. |
| المصدر: | 2017 International Semiconductor Conference (CAS) Semiconductor Conference (CAS), 2017 International. :235-236 Oct, 2017 |
| Relation: | 2017 International Semiconductor Conference (CAS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781509039852 |
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| DOI: | 10.1109/SMICND.2017.8101210 |