مؤتمر
A sophisticated FIB system with a new very low energy ion gun for nm-finishing
| العنوان: | A sophisticated FIB system with a new very low energy ion gun for nm-finishing |
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| المؤلفون: | Beag, Y.W., Gotoh, M., Shimizu, R., Aihara, R., Takahashi, H. |
| المصدر: | 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 2:795-798 vol.2 1998 |
| Relation: | 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078034538X 9780780345386 |
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| DOI: | 10.1109/IIT.1998.813787 |