مؤتمر
Effects of N/sub 2/ addition on aluminum alloy etching: optical emission spectroscopy studies
| العنوان: | Effects of N/sub 2/ addition on aluminum alloy etching: optical emission spectroscopy studies |
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| المؤلفون: | Kil Ho Kim, Kang Sup Shin, Kye Hyun Baek, Chang Wook Park, Won Gyu Lee |
| المصدر: | ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) VLSI and CAD VLSI and CAD, 1999. ICVC '99. 6th International Conference on. :448-451 1999 |
| Relation: | ICVC'99. 6th International Conference on VLSI and CAD |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780357272 9780780357273 |
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| DOI: | 10.1109/ICVC.1999.820961 |