Creation of nanoelectronic devices by focussed ion beam implantation

التفاصيل البيبلوغرافية
العنوان: Creation of nanoelectronic devices by focussed ion beam implantation
المؤلفون: Koch, J., Grun, K., Ruff, M., Wernhardt, R., Wieck, A.D.
المصدر: IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029) Industrial electronics Industrial Electronics Society, 1999. IECON '99 Proceedings. The 25th Annual Conference of the IEEE. 1:35-39 vol.1 1999
Relation: IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780357353
9780780357358
DOI:10.1109/IECON.1999.822165