MOSCAP and MOSFET characteristics using ZrO/sub 2/ gate dielectric deposited directly on Si

التفاصيل البيبلوغرافية
العنوان: MOSCAP and MOSFET characteristics using ZrO/sub 2/ gate dielectric deposited directly on Si
المؤلفون: Wen-Jie Qi, Renee Nieh, Byoung Hun Lee, Laegu Kang, Yongjoo Jeon, Onishi, K., Ngai, T., Banerjee, S., Lee, J.C.
المصدر: International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) Electron devices Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International. :145-148 1999
Relation: International Electron Devices Meeting 1999. Technical Digest
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780354109
9780780354104
DOI:10.1109/IEDM.1999.823866