مؤتمر
Fundamental diffusion issues for deep-submicron device processing
العنوان: | Fundamental diffusion issues for deep-submicron device processing |
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المؤلفون: | Cowern, N.E.B., Jaraiz, M., Cristiano, F., Claverie, A., Mannino, G. |
المصدر: | International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) Electron devices Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International. :333-336 1999 |
Relation: | International Electron Devices Meeting 1999. Technical Digest |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780354109 9780780354104 |
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DOI: | 10.1109/IEDM.1999.824163 |