مؤتمر
Co-silicide formation on silicon FEAs from Co, Co/Ti and Ti/Co layers
العنوان: | Co-silicide formation on silicon FEAs from Co, Co/Ti and Ti/Co layers |
---|---|
المؤلفون: | Byung Chang Shim, Byung-Gook Park, Jong Duk Lee |
المصدر: | International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) Electron devices Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International. :709-712 1999 |
Relation: | International Electron Devices Meeting 1999. Technical Digest |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780354109 9780780354104 |
---|---|
DOI: | 10.1109/IEDM.1999.824250 |