Microfluidic fabrication approach for atomic force microscope cantilevers with photocurable resins

التفاصيل البيبلوغرافية
العنوان: Microfluidic fabrication approach for atomic force microscope cantilevers with photocurable resins
المؤلفون: Lee, Bora, Yoon, Yeowon, Lee, Jungchul
المصدر: 2018 IEEE Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2018 IEEE. :1275-1278 Jan, 2018
Relation: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538647820
9781538645543
تدمد:21601968
DOI:10.1109/MEMSYS.2018.8346797