مؤتمر
High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing
| العنوان: | High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing |
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| المؤلفون: | Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Saitou, Takashi |
| المصدر: | 2018 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2018 China. :1-7 Mar, 2018 |
| Relation: | 2018 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781538653081 9781538653074 |
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| DOI: | 10.1109/CSTIC.2018.8369210 |