A wafer map yield model based on deep learning for wafer productivity enhancement

التفاصيل البيبلوغرافية
العنوان:	A wafer map yield model based on deep learning for wafer productivity enhancement
المؤلفون:	Jang, Sung-Ju, Lee, Jee-Hyong, Kim, Tae-Woo, Kim, Jong-Seong, Lee, Hyun-Jin, Lee, Jong-Bae
المصدر:	2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :29-34 Apr, 2018
Relation:	2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
قاعدة البيانات:	IEEE Xplore Digital Library