التفاصيل البيبلوغرافية
| العنوان: |
Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology |
| المؤلفون: |
Yang, Wei-Ting, Blue, Jakey, Roussy, Agnes, Reis, Marco, Pinaton, Jacques |
| المصدر: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :346-352 Apr, 2018 |
| Relation: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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