دورية أكاديمية
Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers
| العنوان: | Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers |
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| المؤلفون: | Yang, F., Qiao, Y., Gao, K., Wu, N., Zhu, Y., Simon, I.W., Su, R. |
| المصدر: | IEEE Transactions on Systems, Man, and Cybernetics: Systems IEEE Trans. Syst. Man Cybern, Syst. Systems, Man, and Cybernetics: Systems, IEEE Transactions on. 50(10):3646-3657 Oct, 2020 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 21682216 21682232 |
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| DOI: | 10.1109/TSMC.2018.2852724 |