مؤتمر
Enhanced Germanium-Tin P-Channel FinFET Performance using Post-Metal Anneal
| العنوان: | Enhanced Germanium-Tin P-Channel FinFET Performance using Post-Metal Anneal |
|---|---|
| المؤلفون: | Lei, Dian, Lee, Kwang Hong, Huang, Yi-Chiau, Bao, Shuyu, Wang, Wei, Masudy-Panah, Saeid, Yadav, Sachin, Kumar, Annie, Dong, Yuan, Kang, Yuye, Xu, Shengqiang, Wu, Ying, Tan, Chuan Seng, Gong, Xiao, Yeo, Yee-Chia |
| المصدر: | 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) Electron Devices Technology and Manufacturing Conference (EDTM), 2018 IEEE 2nd. :50-52 Mar, 2018 |
| Relation: | 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781538637128 9781538637111 |
|---|---|
| DOI: | 10.1109/EDTM.2018.8421413 |