مؤتمر
HAXPES evaluation of ferroelectric HfSiO MIM capacitor
| العنوان: | HAXPES evaluation of ferroelectric HfSiO MIM capacitor |
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| المؤلفون: | Usuda, Koji, Kamimuta, Yuuichi, Kabuyanagi, Shoichi, Yoshiki, Masahiko, Tomita, Mitsuhiro, Saitoh, Masumi |
| المصدر: | 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) Electron Devices Technology and Manufacturing Conference (EDTM), 2018 IEEE 2nd. :316-318 Mar, 2018 |
| Relation: | 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781538637128 9781538637111 |
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| DOI: | 10.1109/EDTM.2018.8421471 |