Failure Analysis Methodology on Systematic MIM failure in Wafer Fabrication

التفاصيل البيبلوغرافية
العنوان: Failure Analysis Methodology on Systematic MIM failure in Wafer Fabrication
المؤلفون: Teo, Angela, Boon, Ang Ghim, Peng, Ng Hui, Qing, Chen Chang, Yun, Xu Nai, Dayanand, N., Seng, Tam Yong, Hong, Mai Zhi, Lam, Jeffrey
المصدر: 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2018 IEEE International Symposium on the. :1-5 Jul, 2018
Relation: 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538649299
تدمد:19461550
DOI:10.1109/IPFA.2018.8452519