Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects

التفاصيل البيبلوغرافية
العنوان: Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects
المؤلفون: Kumar, P., Pratap, R., Talukder, S., Kumar, S., Shastri, V., Maurya, R., Mruthyunjaya, S.K.B.
المصدر: 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2018 IEEE International Conference on. :181-185 Aug, 2018
Relation: 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538662144
9781538662137
DOI:10.1109/3M-NANO.2018.8552166