Multi-domain process modeling for advanced logic and memory devices: from equimpments to materials

التفاصيل البيبلوغرافية
العنوان: Multi-domain process modeling for advanced logic and memory devices: from equimpments to materials
المؤلفون: Jang, Inkook, Ko, Hyoungsoo, Schmidt, Alexander, Kim, Sae-Jin, Cha, Moonhyun, Ahn, Hyoshin, Park, Honglae, Kim, Dae Sin, Kang, Ho-Kyu
المصدر: 2018 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2018 IEEE International. :33.4.1-33.4.4 Dec, 2018
Relation: 2018 IEEE International Electron Devices Meeting (IEDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728119878
تدمد:2156017X
DOI:10.1109/IEDM.2018.8614630