مؤتمر
Simulation of Granular Temperature of Abrasive Particles in the EKF-CMP System
| العنوان: | Simulation of Granular Temperature of Abrasive Particles in the EKF-CMP System |
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| المؤلفون: | Lu, Li-Shin, Lin, Yu-Ming, Chen, Chao-Chang A. |
| المصدر: | 2018 IEEE International Conference on Advanced Manufacturing (ICAM) Advanced Manufacturing (ICAM), 2018 IEEE International Conference on. :127-130 Nov, 2018 |
| Relation: | 2018 IEEE International Conference on Advanced Manufacturing (ICAM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538656099 |
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| DOI: | 10.1109/AMCON.2018.8614792 |