مؤتمر
Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication
| العنوان: | Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication |
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| المؤلفون: | Wolf, Heiko, Cho, Yu K. Ryu, Karg, Siegfried, Mensch, Philipp, Schwemmer, Christian, Knoll, Armin, Spieser, Martin, Bisig, Samuel, Rawlings, Colin, Paul, Philip, Holzner, Felix, Duerig, Urs |
| المصدر: | 2019 Pan Pacific Microelectronics Symposium (Pan Pacific) Microelectronics Symposium (Pan Pacific), 2019 Pan Pacific. :1-9 Feb, 2019 |
| Relation: | 2019 Pan Pacific Microelectronics Symposium (Pan Pacific) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781944543099 9781944543105 |
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| DOI: | 10.23919/PanPacific.2019.8696898 |